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Chemical diverting equipment:
Application field: IC integrated circuit, LED, TFT, optical fiber and other industries Commonly used chemicals: AL-Stripper/IPA/CH3COOH/ PGMEA, NMP and other related functions: diverting
Related configuration: leakage detection, exhaust negative pressure gauge, cleaning, waste discharge, etc.
Chemical diverting equipment:
Application field: IC integrated circuit, LED, TFT, optical fiber and other industries Commonly used chemicals: AL-Stripper/IPA/CH3COOH/ PGMEA, NMP and other related functions: diverting
Related configuration: leakage detection, exhaust negative pressure gauge, cleaning, waste discharge, etc.
Key device configuration:
One way in, multiple ways out
Leakage alarm sensor
Manual valve, pneumatic valve
Process flush and drain valve
Remote control, etc.
