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Specialty gas supply systems adopt independent air sources, and VMBs or VMPs will be used for gas distributing to multiple use points. VMBs or VMPs adopt branch pneumatic valves, nitrogen purging and vacuum assisted empting, etc. Due to the large amount of BSGS gas, the use of independent gas room and individual ventilation system is becoming more and more popular. According to the different requirements of customers, the control system of gas equipment can be of different types of automatic, semi-automatic and manual.
VMB is the distribution box of the gas supply system, which is used to divide the electronic special gas from the main pipeline into multiple branches. The branches supply the electronic special gas safely and stably to the production equipment through secondary piping.
The number of VMB branches can be customized according to customer needs.
The liquid special gas delivery system LDS is specifically designed for the delivery of liquid precursors such as TMA, TEOS, etc.
The LDS system can achieve good pressure control, temperature control, and carrier gas flow control, ensuring safe, stable, and continuous supply of precursors to downstream processes.
GR is used for the transportation of inert electronic specialty gases, which can achieve stable and continuous gas supply. PN2 protection during disk blowing and cylinder replacement can maintain and ensure the purity and quality of electronic specialty gases.
Gas cylinder racks can be customized according to customer needs and are divided into automatic and manual types.
The Bulk Special Gas Supply System (BSGS) is a high flow electronic special gas supply equipment that can safely, stably, and continuously provide ultra large flow electronic special gas transportation.
The equipment adopts high Cv valve components, which can meet the pressure stability under high flow transmission of electronic special gas, while avoiding condensation and frosting on the gas surface; The deep blowing design of the disk can ensure the purity and quality of electronic specialty gases.
GC is a gas supply equipment designed specifically for the supply of flammable, corrosive, toxic and other electronic specialty gases, used for safe and stable transportation of electronic specialty gases.
The fully automatic design of the gas cylinder cabinet enables continuous and uninterrupted supply of electronic specialty gas; PN2 protection can maintain and ensure the purity and quality of electronic specialty gases during automatic disk blowing and cylinder replacement.
VDB is a primary diversion device in the bulk special gas supply system, which is used to divide the bulk special gas main pipeline into several secondary main pipelines for the supply of high flow electronic special gas.
Special gas delivery system for semiconductor and LCD microelectronic solar industry, mostly used for toxic/flammable/corrosive and rare gases.
