Chemical diverting equipment:
Application field: IC integrated circuit, LED, TFT, optical fiber and other industries Commonly used chemicals: AL-Stripper/IPA/CH3COOH/ PGMEA, NMP and other related functions: diverting
Related configuration: leakage detection, exhaust negative pressure gauge, cleaning, waste discharge, etc.

Key device configuration:

One way in, multiple ways out

Leakage alarm sensor

Manual valve, pneumatic valve

Process flush and drain valve

Remote control, etc.