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Chemical is supplied by TANK and ton barrel, while CDM uses N+1 pumps according to usage demand. The branch is supplied by T-BOX and VMB. VMBs adopt the main manual valves and the branch manual pneumatic valves. On the bottom, the VMB is equipped with leakage/cleaning discharge valve, pure water flushing and nitrogen pressure maintaining.
Chemical automatic liquid supply system:
Application field: semiconductor, solar energy, liquid crystal panel, optical fiber and other production fields
Commonly used chemicals: HF/HNO3/HCL/H2SO4 /KOH/NAOH/H2O2/NH4OH and other related functions: sampling, circulation, delivering
Chemical automatic liquid supply system:
Application field: semiconductor, solar energy, liquid crystal panel, optical fiber and other production fields
Commonly used chemicals: HF/HNO3/HCL/H2SO4 /KOH/NAOH/H2O2/NH4OH, etc.
Automatic chemical filling equipment
Application: semiconductor, solar energy, liquid crystal panel, optical fiber and other production fields
Commonly used chemicals: HF/HNO3/HCL/H2SO4/ KOH/NAOH/H2O2/NH4OH
Organic chemical automatic liquid supply system: Application field: semiconductor, solar energy, liquid crystal panel, optical fiber and other production fields
Commonly used chemicals: HF/HNO3/HCL/H2SO4/ KOH/NAOH/H2O2/NH4OH, etc.
Chemical diverting equipment:
Application field: IC integrated circuit, LED, TFT, optical fiber and other industries Commonly used chemicals: AL-Stripper/IPA/CH3COOH/ PGMEA, NMP and other related functions: diverting
Related configuration: leakage detection, exhaust negative pressure gauge, cleaning, waste discharge, etc.
Chemical diverting equipment:
Application field: semiconductor, solar energy, liquid crystal panel, optical fiber and other production fields
Commonly used chemicals: HF/HNO3/HCL/H2SO4/ -KOH/NAOH/H2O2/NH4OH, etc.