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With the enterprise vision of "To providing customers with stable, reliable and intelligent process system", the company is committed to electronics, semiconductor, new energy and medicine and other advanced manufacturing fields
Adsorption treatment equipment will be used to absorb harmful gases through the van der Waals force, while the non-toxic and harmless gases will be discharged directly to the air. Harmful gases absorbed can be BCL3, CL2, AsH3, NH3 and so on. Characteristics: long service life of chemical resin; easy maintaining; using anti-corrosive materials and technology; easy to replace resin; the end of the barrel fitted with a color indication label.
Heating water washing treatment equipment will deal with some flammable decomposition, and the decomposition of the product is easily soluble in water gas, such as PH3, B2H6, NH3 and so on
The combustion water washing treatment equipment deals with some spontaneous combustion, flammable and explosive gases, such as SiH4, H2, PH3 and so on
Heating water washing treatment equipment will deal with some flammable and easily decomposed gases which are soluble in water after decomposition, such as PH3, B2H6, NH3 and so on. Features: no dust accumulation problem; easy maintaining; using anti-corrosion materials and technologies;
Electric heating water washing treatment equipment will deal with some flammable and easily decomposed gases which are soluble in water after decomposition, such as PH3, B2H6, NH3 and so on. Features: no dust accumulation problem; Easy maintaining; Using anti-corrosion materials and technologies;
Plasma treatment equipment is a treatment method used in case no other treatment method is possible. The gases treated usually contain fluorine, such as NF3, CF4, SF6, etc. Characteristics: The high-temperature decomposed gas generated by electrode heating is cooled so that the discharged gas can meet the temperature and emission requirements.