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Reliable high purity process system integrated solution will provide reliable high purity industrial overall solution for advanced manufacturing enterprises.
VMBs are used in special gas delivery systems of semiconductor and LCD microelectronic solar industry, and mostly for toxic/flammable/corrosive and rare gases. For multiple use points, gases still need to be supplied through VMB or VMP branch. The customers can set the number of diverting and the flow pressure according to the process requirements. The gas is adjusted on the manifold box to meet the precise requirements of the process equipment and then delivered to the gas points.
It is used in the special gas transmission system of semiconductor and LCD microelectronic solar energy industry, mostly for toxic/flammable/corrosive and rare gases.
The bulk and special gas supply system (BSGS) adopts fully automatic PLC controller, color touch screen, pneumatic valve and pressure sensor on the gas panel, which can realize automatic switching, automatic nitrogen purging, automatic vacuum auxiliary venting, multiple safety protection measures, leakage detection, remote emergency cut-off, special nitrogen purging origin, etc.
