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Reliable high purity process system integrated solution will provide reliable high purity industrial overall solution for advanced manufacturing enterprises.
VMBs are used in special gas delivery systems of semiconductor and LCD microelectronic solar industry, and mostly for toxic/flammable/corrosive and rare gases. For multiple use points, gases still need to be supplied through VMB or VMP branch. The customers can set the number of diverting and the flow pressure according to the process requirements. The gas is adjusted on the manifold box to meet the precise requirements of the process equipment and then delivered to the gas points.
Cylinder racks are suitable for non-hazardous gases including inert gases and oxidizing gases. The main body is made of stainless steel, with metal cylinder fixing bracket and chain. The main valve fittings are made of SUS 316 stainless steel, with pressure resistance, corrosion resistance and ultra-purity guarantee. The main valve fittings are all from international high-end brands.
Manual emptying.
Manually switch cylinder gas supply mode.
100% of the disk surface was detected by He.
Heating water washing treatment equipment will deal with some flammable decomposition, and the decomposition of the product is easily soluble in water gas, such as PH3, B2H6, NH3 and so on
Heating water washing treatment equipment will deal with some flammable and easily decomposed gases which are soluble in water after decomposition, such as PH3, B2H6, NH3 and so on. Features: no dust accumulation problem; easy maintaining; using anti-corrosion materials and technologies;