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Reliable high purity process system integrated solution will provide reliable high purity industrial overall solution for advanced manufacturing enterprises.
VMB is the distribution box of the gas supply system, which is used to divide the electronic special gas from the main pipeline into multiple branches. The branches supply the electronic special gas safely and stably to the production equipment through secondary piping.
The number of VMB branches can be customized according to customer needs.
GR is used for the transportation of inert electronic specialty gases, which can achieve stable and continuous gas supply. PN2 protection during disk blowing and cylinder replacement can maintain and ensure the purity and quality of electronic specialty gases.
Gas cylinder racks can be customized according to customer needs and are divided into automatic and manual types.
Heating water washing treatment equipment will deal with some flammable decomposition, and the decomposition of the product is easily soluble in water gas, such as PH3, B2H6, NH3 and so on
Heating water washing treatment equipment will deal with some flammable and easily decomposed gases which are soluble in water after decomposition, such as PH3, B2H6, NH3 and so on. Features: no dust accumulation problem; easy maintaining; using anti-corrosion materials and technologies;
