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Specialty gas supply systems adopt independent air sources, and VMBs or VMPs will be used for gas distributing to multiple use points. VMBs or VMPs adopt branch pneumatic valves, nitrogen purging and vacuum assisted empting, etc. Due to the large amount of BSGS gas, the use of independent gas room and individual ventilation system is becoming more and more popular. According to the different requirements of customers, the control system of gas equipment can be of different types of automatic, semi-automatic and manual.
VMBs are used in special gas delivery systems of semiconductor and LCD microelectronic solar industry, and mostly for toxic/flammable/corrosive and rare gases. For multiple use points, gases still need to be supplied through VMB or VMP branch. The customers can set the number of diverting and the flow pressure according to the process requirements. The gas is adjusted on the manifold box to meet the precise requirements of the process equipment and then delivered to the gas points.
TMA liquid delivering cabinets are used for Specialty Gas delivery system in semiconductor and LCD microelectronic solar industry. TMA is colorless and transparent at normal temperature and it would catch fire in an instant in the air. Even in cold water, it would create an explosive decomposition reaction and produce methane which can cause tissue destruction and burning. Spontaneous combustion in the air can catch fire in an instant. In case spontaneous combustion occurs in the air, it emits harmful alumina smoke which can stimulate and corrode the eyes, skin and mucous membranes of the respiratory tract. After inhalation, the trachea and lungs are damaged, and serious cases can cause pulmonary edema.
Cylinder racks are suitable for non-hazardous gases including inert gases and oxidizing gases. The main body is made of stainless steel, with metal cylinder fixing bracket and chain. The main valve fittings are made of SUS 316 stainless steel, with pressure resistance, corrosion resistance and ultra-purity guarantee. The main valve fittings are all from international high-end brands.
Manual emptying.
Manually switch cylinder gas supply mode.
100% of the disk surface was detected by He.
It is used in the special gas transmission system of semiconductor and LCD microelectronic solar energy industry, mostly for toxic/flammable/corrosive and rare gases.
The bulk and special gas supply system (BSGS) adopts fully automatic PLC controller, color touch screen, pneumatic valve and pressure sensor on the gas panel, which can realize automatic switching, automatic nitrogen purging, automatic vacuum auxiliary venting, multiple safety protection measures, leakage detection, remote emergency cut-off, special nitrogen purging origin, etc.
GC/gas supply cabinets are used for Specialty Gas delivery system of semiconductor and LCD microelectronic solar industry, and mostly for toxic/flammable/corrosive and rare gases. Gas supply cabinets are designed primarily for the safe storage and operation of high purity highly toxic, flammable, spontaneous combustion, corrosive, oxidizing, reactive cylinder gases. The gas cabinet is equipped with a 2.6mm steel cabinet coated with corrosion resistant paint, and the visible window is assembled with steel wire mesh safety glass window. At the same time, some safety components including overcurrent signal switch/infrared UV flame detector/high temperature probe/fire water, etc. can be assembled according to the gas dangerous nature.
Gas supply cabinets are designed primarily for the safe storage and operation of high purity highly toxic, flammable, spontaneous combustion, corrosiveness, oxidizing, reactive cylinder gas.
Special gas delivery system for semiconductor and LCD microelectronic solar industry, mostly used for toxic/flammable/corrosive and rare gases.
